Title:
CLEAN OVEN
Document Type and Number:
WIPO Patent Application WO/2018/193646
Kind Code:
A1
Abstract:
A clean oven (10) which performs heat treatment of a workpiece (W) by circulating a gas is characterized by being provided with: a heat treatment chamber (2) in which the workpiece (W) to be heat treated is disposed, and which includes a gas inlet (21) through which the gas flows in and a gas outlet (22) through which the gas flows out; a filter (4) attached to the gas inlet (21) with a seal member (3) interposed therebetween; a circulating flow path (6) which sends the gas that has flowed out from the gas outlet (22) into a pre-filter space (5) in which the gas prior to passing through the filter (4) is present; and a guide plate (7) which is positioned in such a way as to surround the seal member (3) on the downstream side, in the direction of gas flow, of the seal member (3), and which guides the gas passing through in the vicinity of the seal member (3) to the circulating flow path (6).
Inventors:
KANEMITSU KAZUAKI
YOKOYAMA MASAKI
YOKOYAMA MASAKI
Application Number:
PCT/JP2017/032209
Publication Date:
October 25, 2018
Filing Date:
September 07, 2017
Export Citation:
Assignee:
CHUGAI RO KOGYO KAISHA LTD (JP)
International Classes:
B01D46/00; F24F13/28
Foreign References:
| JP2007307445A | 2007-11-29 | |||
| JPS5813933Y2 | 1983-03-18 | |||
| JP2003302078A | 2003-10-24 | |||
| JP2004163014A | 2004-06-10 | |||
| JP2000329472A | 2000-11-30 |
Attorney, Agent or Firm:
SAMEJIMA, Mutsumi et al. (JP)
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