Title:
CLEAN ROOM FACILITY
Document Type and Number:
WIPO Patent Application WO/2023/042332
Kind Code:
A1
Abstract:
Provided is a clean room facility that is low cost and that prevents the intrusion of insects into the clean room. A clean room facility (100) comprises: a finishing sheet (6) that is disposed on the upper side of a floor base (2) of a clean room (R), and that forms the floor surface of the clean room (R); and a disposable application sheet (5) that is interposed between the floor base (2) and the finishing sheet (6). The disposable application sheet (5) is also disposed on the lower side of a panel member (1) which is a lateral wall of the clean room (R), and the disposable application sheet extends to an area near an outer wall (20) of a building that includes the clean room (R).
Inventors:
NISHIMURA NORITOSHI (JP)
IMAGUCHI NOBUHIRO (JP)
SATO YUUITI (JP)
IMAGUCHI NOBUHIRO (JP)
SATO YUUITI (JP)
Application Number:
PCT/JP2021/034079
Publication Date:
March 23, 2023
Filing Date:
September 16, 2021
Export Citation:
Assignee:
HITACHI GLOBAL LIFE SOLUTIONS INC (JP)
International Classes:
E04H5/02
Foreign References:
JPH0868221A | 1996-03-12 | |||
JP3145829U | 2008-10-23 | |||
JP2004353875A | 2004-12-16 | |||
JP2019099585A | 2019-06-24 | |||
JP2011223926A | 2011-11-10 |
Attorney, Agent or Firm:
ISONO INTERNATIONAL PATENT OFFICE, P.C. (JP)
Download PDF:
Previous Patent: STRAIN WAVE GEAR DEVICE
Next Patent: PIN WIRE FORMATION METHOD AND WIRE BONDING APPARATUS
Next Patent: PIN WIRE FORMATION METHOD AND WIRE BONDING APPARATUS