Title:
CLEAN ROOM
Document Type and Number:
WIPO Patent Application WO/1987/003356
Kind Code:
A1
Abstract:
A clean room which can be used suitably when it is desired to keep the air inside a clean room at an ultrahigh purity. This clean room is equipped with a ceiling (23), a floor (28), an indoor space (30) between said ceiling and said floor, air supply means (24) for supplying an ultrahigh-purity air into the indoor space and air discharge means (40) for discharging the air supplied into the indoor space. The indoor space is divided into a first region (B) of which a high purity is required and a second region (A) which is adjacent to the first region and of which a purity further higher than that of the first region is required. The air supply means is equipped with air blow ports (26) which are disposed on the ceiling of the second region and blows out the air downward, and the air discharge means is equipped with first air suction ports (25) which are disposed on the ceiling of the first region and sucks the air upward. Part of the clean air blown downward from the air blow ports is taken into the first air suction ports so that an air stream having a large lateral velocity component flowing from the second region generates inside the indoor space and prevents intrusion of dust from the first region to the second region.
Inventors:
SUZUKI YOSHINOBU (JP)
MANABE MITSUFUSA (JP)
MANABE MITSUFUSA (JP)
Application Number:
PCT/JP1986/000603
Publication Date:
June 04, 1987
Filing Date:
November 26, 1986
Export Citation:
Assignee:
SHIMIZU CONSTRUCTION CO LTD (JP)
International Classes:
F24F3/16; F24F7/06; (IPC1-7): F24F3/16; F24F7/06
Foreign References:
| JPH0699943A | 1994-04-12 | |||
| JPS58127033A | 1983-07-28 | |||
| JPS60144542A | 1985-07-30 |
Other References:
See also references of EP 0250596A4
Download PDF: