Title:
CLEANING AGENT COMPOSITION AND CLEANING METHOD
Document Type and Number:
WIPO Patent Application WO/2020/184618
Kind Code:
A1
Abstract:
A cleaning agent composition which is used for the purpose of removing an adhesive residue, and which contains a quaternary ammonium salt and a solvent that is composed only of an organic solvent that contains N, N, N', N'-tetra(hydrocarbon) urea.
Inventors:
OGINO HIROSHI (JP)
OKUNO TAKAHISA (JP)
KARASAWA RYO (JP)
SHINJO TETSUYA (JP)
OKUNO TAKAHISA (JP)
KARASAWA RYO (JP)
SHINJO TETSUYA (JP)
Application Number:
PCT/JP2020/010580
Publication Date:
September 17, 2020
Filing Date:
March 11, 2020
Export Citation:
Assignee:
NISSAN CHEMICAL CORP (JP)
International Classes:
C11D7/32; C11D7/50; H01L21/304
Foreign References:
| JP2017199754A | 2017-11-02 | |||
| JP2016527707A | 2016-09-08 |
Attorney, Agent or Firm:
KURIHARA, Hiroyuki et al. (JP)
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