Title:
CLEANING DEVICE AND CLEANING METHOD
Document Type and Number:
WIPO Patent Application WO/2018/225497
Kind Code:
A1
Abstract:
Provided is a cleaning method for cleaning an inner wall surface (502) of a bell jar (500) by discharging a cleaning fluid containing abrasive grains from nozzles (112, 122), wherein the distances between the nozzles (112, 122) and the inner wall surface (502) are adjusted so that the nozzles (112, 122) can discharge the cleaning fluid at a discharge pressure at which erosion caused by the cleaning fluid is 500 µm/hour or less, and so that an impingement pressure of the cleaning fluid against the inner wall surface (502) is ensured to have a pressure at which the dirt on the inner wall surface (502) can be removed.
Inventors:
TAKATOU SOU (JP)
FUKUE MAKOTO (JP)
MITO YOSHIFUMI (JP)
FUKUE MAKOTO (JP)
MITO YOSHIFUMI (JP)
Application Number:
PCT/JP2018/019642
Publication Date:
December 13, 2018
Filing Date:
May 22, 2018
Export Citation:
Assignee:
TOKUYAMA CORP (JP)
International Classes:
C01B33/035; B08B3/02; B08B7/02; C23C16/44; H01L21/205
Domestic Patent References:
| WO2012063432A1 | 2012-05-18 |
Foreign References:
| JP2017039617A | 2017-02-23 | |||
| JP2013199694A | 2013-10-03 | |||
| JP2010275183A | 2010-12-09 | |||
| JP2000297342A | 2000-10-24 | |||
| JP2007332462A | 2007-12-27 | |||
| JPS56114815A | 1981-09-09 | |||
| JPH06216036A | 1994-08-05 | |||
| JP2009196882A | 2009-09-03 | |||
| JP2012101984A | 2012-05-31 | |||
| JP2012020917A | 2012-02-02 | |||
| JPH02145767A | 1990-06-05 |
Other References:
See also references of EP 3636594A4
Attorney, Agent or Firm:
HARAKENZO WORLD PATENT & TRADEMARK (JP)
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