Title:
CLEANING DEVICE FOR REACTION FURNACE AND REACTION FURNACE
Document Type and Number:
WIPO Patent Application WO/2023/130533
Kind Code:
A1
Abstract:
A cleaning device for a reaction furnace (4) and a reaction furnace (4). The cleaning device for a reaction furnace (4) comprises a cleaning part (1), a supporting part (2) and a driving part (3). The cleaning part (1) is arranged to be in contact with the inner wall of the reaction furnace (4), the supporting part (2) is arranged inside the reaction furnace (4), and the cleaning part (1) is mounted on the supporting part (2). The driving part (3) is arranged on the side of the supporting part (2) away from the cleaning part (1) and is fixedly connected to a first end of the supporting part (2), wherein the driving part (3) is configured to drive the supporting part (2) to rotate, and the supporting part (2) drives the cleaning part (1) to move relative to the inner wall of the reaction furnace (4).
Inventors:
CHEN TAO (CN)
Application Number:
PCT/CN2022/076868
Publication Date:
July 13, 2023
Filing Date:
February 18, 2022
Export Citation:
Assignee:
CHANGXIN MEMORY TECH INC (CN)
International Classes:
B08B9/087; B08B3/08; B08B9/093; B08B13/00; B08B15/04; H01L21/67
Foreign References:
| CN205628841U | 2016-10-12 | |||
| CN2586541Y | 2003-11-19 | |||
| CN109351731A | 2019-02-19 | |||
| CN101497443A | 2009-08-05 | |||
| CN108160634A | 2018-06-15 | |||
| CN210474870U | 2020-05-08 | |||
| JP2017039617A | 2017-02-23 | |||
| CN210146597U | 2020-03-17 | |||
| CN214865900U | 2021-11-26 | |||
| CN207271737U | 2018-04-27 | |||
| CN211726848U | 2020-10-23 |
Attorney, Agent or Firm:
BOXIN CHINA INTELLECTUAL PROPERTY (CN)
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