Title:
CLEANING DEVICE
Document Type and Number:
WIPO Patent Application WO/2017/179667
Kind Code:
A1
Abstract:
Provided is a cleaning device which makes it possible to obtain a cleaning liquid with high degree of cleanliness. The cleaning device 10 is provided with: a dissolution tank 20 for dissolving a gas into a liquid; a transfer pump 30 for sending the liquid as well as the gas into the dissolution tank 20; and an injection nozzle 40 for injecting the liquid accumulated in the dissolution tank 20 onto an object W. The transfer pump 30 is a volumetric pump. The portions of the dissolution tank 20, the transfer pump 30, and the injection nozzle 40 that come into contact with the liquid are formed from a fluororesin. The cleaning device 10 is provided with a heating device 27 for heating the liquid.
Inventors:
TAKAHASHI TSUNEJIRO (JP)
TATERA KATSUMI (JP)
TAKAHASHI MASAYOSHI (JP)
TATERA KATSUMI (JP)
TAKAHASHI MASAYOSHI (JP)
Application Number:
PCT/JP2017/015164
Publication Date:
October 19, 2017
Filing Date:
April 13, 2017
Export Citation:
Assignee:
OPT CREATION INC (JP)
SHIGENKAIHATSUKENKYUJYO INC (JP)
SHIGENKAIHATSUKENKYUJYO INC (JP)
International Classes:
H01L21/304; B01F1/00; B01F3/04; B01F5/00; B01F5/06; C02F1/00; C02F1/68; C02F1/78; C01B13/10
Domestic Patent References:
| WO2016017700A1 | 2016-02-04 |
Attorney, Agent or Firm:
TSUKUNI & ASSOCIATES et al. (JP)
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