CLEANING LIQUID FILTERING DEVICE AND METHOD FOR USE IN LINEAR COATER, AND LINEAR COATER - WUHAN CHINA STAR OPTOELECTRONICS TECHNOLOGY CO LTD

Title:

CLEANING LIQUID FILTERING DEVICE AND METHOD FOR USE IN LINEAR COATER, AND LINEAR COATER

Document Type and Number:

WIPO Patent Application WO/2019/080164

Kind Code:

A1

Abstract:

Provided is a cleaning liquid filtering device (3) for use in a linear coater, the cleaning liquid filtering device comprising: a container body (30) having one side in communication with the bottom of a cleaning sink (15) for containing the cleaning liquid (150) in the linear coater via a first pipe (31); at least one filter membrane (32) arranged inside the container body (30) and used for filtering out the photoresist and the photoresist additives in the cleaning liquid; and a delivery pipe (34) for delivering the filtered cleaning liquid into the cleaning sink (15). Further provided are a corresponding method and a linear coater.

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Inventors:

LI WEI (CN)
YI TIANHUA (CN)

Application Number:

PCT/CN2017/109705

Publication Date:

May 02, 2019

Filing Date:

November 07, 2017

Export Citation:

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Assignee:

WUHAN CHINA STAR OPTOELECTRONICS TECHNOLOGY CO LTD (CN)

International Classes:

B05D5/12; G02F1/133

Foreign References:

US20060147618A1	2006-07-06
CN1991594A	2007-07-04
CN106773536A	2017-05-31
US20030097983A1	2003-05-29
CN106378331A	2017-02-08

Attorney, Agent or Firm:

SHENZHEN RONDA PATENT AND TRADEMARK LAW OFFICE (CN)

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