Title:
CLEANING METHOD AND CLEANING DEVICE USED IN SAID CLEANING METHOD
Document Type and Number:
WIPO Patent Application WO/2011/081071
Kind Code:
A1
Abstract:
The disclosed cleaning method involves a cleaning step for cleaning an object to be cleaned, wherein said cleaning step involves: an immersion step (step 1) in which the object to be cleaned having deposited flux residues is immersed in a cleaning tank with adjustable pressure containing a detergent of a particular composition; a pressure reduction step (step 2) in which the pressure in the cleaning tank is set to P1 (kPa); a reduced pressure maintaining step (step 3) in which, for 8 to 16 seconds, the pressure in the cleaning tank, which was reduced in the pressure reduction step, is continuously maintained at P1 ± 0.4 (kPa) and the temperature of the detergent composition inside the cleaning tank is continuously maintained at 50-70°C; and a pressure increasing step (step 4) in which the pressure inside the cleaning tank is raised to P2 (kPa) after the pressure maintaining step is complete. Steps 2 through 4 are performed in 10-220 seconds.
Inventors:
KAWASHIMO Hirokazu (())
Application Number:
JP2010/073177
Publication Date:
July 07, 2011
Filing Date:
December 22, 2010
Export Citation:
Assignee:
KAO CORPORATION (14-10, Nihonbashi Kayabacho 1-chome Chuo-k, Tokyo 10, 〒1038210, JP)
花王株式会社 (〒10 東京都中央区日本橋茅場町一丁目１４番１０号 Tokyo, 〒1038210, JP)
SAKURA SEIKI CO., LTD. (75-5, Ooaza Imojiya Chikuma-sh, Nagano 15, 〒3870015, JP)
花王株式会社 (〒10 東京都中央区日本橋茅場町一丁目１４番１０号 Tokyo, 〒1038210, JP)
SAKURA SEIKI CO., LTD. (75-5, Ooaza Imojiya Chikuma-sh, Nagano 15, 〒3870015, JP)
International Classes:
B08B3/08; B23K1/00; C11D7/26; C11D7/32
Attorney, Agent or Firm:
IKEUCHI SATO & PARTNER PATENT ATTORNEYS (26th Floor, OAP TOWER 8-30, Tenmabashi 1-chome, Kita-ku, Osaka-sh, Osaka 26, 〒5306026, JP)