Title:
CLEANING METHOD AND CLEANING DEVICE
Document Type and Number:
WIPO Patent Application WO/2017/217468
Kind Code:
A1
Abstract:
The purpose of the present invention is to provide a cleaning method and a cleaning device with which matter to be cleaned can be desirably removed from a member to be cleaned in a more preferable manner.
The cleaning method and the cleaning device according to the present invention are characterized in that, while maintaining a state in which a plurality of members to be cleaned and a processing liquid spraying opening are submerged in a processing liquid, and in a state in which a relative reciprocal motion comprising at least one of a horizontal direction reciprocal motion and a vertical direction reciprocal motion of the plurality of members to be cleaned relative to the processing liquid spraying opening is being performed, the processing liquid is sprayed out of the processing liquid spraying opening to remove matter to be cleaned, which has formed on the plurality of members to be cleaned, and the removed matter to be cleaned is discharged together with the processing liquid in which the plurality of members to be cleaned have been submerged, and together with the processing liquid that has been sprayed out of the processing liquid spraying opening.
Inventors:
SAITOH MASAHIRO (JP)
NAKAZAWA KENICHI (JP)
NAKAZAWA KENICHI (JP)
Application Number:
PCT/JP2017/022004
Publication Date:
December 21, 2017
Filing Date:
June 14, 2017
Export Citation:
Assignee:
DALTON CORP (JP)
International Classes:
H01L21/304; H01L21/306
Domestic Patent References:
| WO2014196099A1 | 2014-12-11 |
Foreign References:
| JPH03295238A | 1991-12-26 | |||
| JP2009202111A | 2009-09-10 |
Attorney, Agent or Firm:
AOKI, Atsushi et al. (JP)
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