CLEANING METHOD - KURITA WATER IND LTD

Title:

CLEANING METHOD

Document Type and Number:

WIPO Patent Application WO/2011/078144

Kind Code:

A1

Abstract:

Disclosed is a low-cost and resource-saving cleaning method wherein high cleaning effects are obtained by high-pressure jet cleaning or two-fluid cleaning using a gas-dissolved water. In the high-pressure jet cleaning method or the two-fluid cleaning method, a cleaning liquid or a mixed fluid of the cleaning liquid and a gas is jetted from a cleaning fluid jetting nozzle toward a subject to be cleaned, and the subject is cleaned. The cleaning liquid introduced into the cleaning fluid jetting nozzle contains the dissolved gas in a quantity equal to or more than the saturation solubility at the liquid temperature of the cleaning liquid.

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Inventors:

TOKOSHIMA HIROTO (JP)
MORITA HIROSHI (JP)

Application Number:

PCT/JP2010/072955

Publication Date:

June 30, 2011

Filing Date:

December 21, 2010

Export Citation:

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Assignee:

KURITA WATER IND LTD (JP)
TOKOSHIMA HIROTO (JP)
MORITA HIROSHI (JP)

International Classes:

H01L21/304; H01L21/027

Foreign References:

JP2001345301A	2001-12-14
JP2002151459A	2002-05-24

Attorney, Agent or Firm:

SHIGENO, Tsuyoshi (JP)
Takeshi Shigeno (JP)

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