Title:
CLEANING NOZZLE AND DUST REMOVAL DEVICE EQUIPPED WITH SAME
Document Type and Number:
WIPO Patent Application WO/2011/039972
Kind Code:
A1
Abstract:
A cleaning nozzle is equipped with a suction nozzle, having a suction opening formed at one end and a discharge opening at the other end and has an internal airflow path, and which detaches dust adhering to the surface of an object to be treated with a suction airflow that sucks the dust in from the suction opening and discharges the dust from the discharge section. Part of the internal surface of the suction nozzle is provided with an adhesive layer for capturing dust.
Inventors:
YASUDA, Tadachika (())
安田忠睦 (())
安田忠睦 (())
Application Number:
JP2010/005722
Publication Date:
April 07, 2011
Filing Date:
September 21, 2010
Export Citation:
Assignee:
SHARP KABUSHIKI KAISHA (22-22, Nagaike-cho Abeno-ku, Osaka-sh, Osaka 22, 〒5458522, JP)
シャープ株式会社 (〒22 大阪府大阪市阿倍野区長池町２２番２２号 Osaka, 〒5458522, JP)
YASUDA, Tadachika (())
シャープ株式会社 (〒22 大阪府大阪市阿倍野区長池町２２番２２号 Osaka, 〒5458522, JP)
YASUDA, Tadachika (())
International Classes:
B08B5/04; B08B5/00; H01L21/304
Attorney, Agent or Firm:
MAEDA, Hiroshi et al. (Osaka-Marubeni Bldg, 5-7 Hommachi 2-chome, Chuo-ku, Osaka-sh, Osaka 53, 〒5410053, JP)
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