Title:
CLEANING NOZZLE AND CLEANING METHOD
Document Type and Number:
WIPO Patent Application WO/2010/097896
Kind Code:
A1
Abstract:
A cleaning nozzle having high cleaning ability. The cleaning nozzle has a hollow body having an introducing opening, an ejecting opening, and a flow path for interconnecting the introducing opening and the ejecting opening. Grooves parallel to the direction of fluid flow in the flow path are formed in the inner peripheral edge at the end of the ejecting opening.
Inventors:
HAYASHIDA, Atsushi (German Center 1-18-2, Hakusan, Midori-ku, Yokohama-sh, Kanagawa 06, 22600, JP)
Application Number:
JP2009/053296
Publication Date:
September 02, 2010
Filing Date:
February 24, 2009
Export Citation:
Assignee:
Aqua Science Corporation (German Center, 1-18-2 Hakusan, Midori-ku, Yokohama-sh, Kanagawa 06, 22600, JP)
アクアサイエンス株式会社 (〒06 神奈川県横浜市緑区白山１－１８－２ ジャーマンセンター Kanagawa, 22600, JP)
アクアサイエンス株式会社 (〒06 神奈川県横浜市緑区白山１－１８－２ ジャーマンセンター Kanagawa, 22600, JP)
International Classes:
H01L21/304; B08B3/02
Attorney, Agent or Firm:
ITOH, Atsushi (Shindo Building 2F, 1-1 Shinkawa 2-chome,Chuo-k, Tokyo 33, 10400, JP)
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