Title:
CLEANING PAD FOR TEST PROBE AND METHOD OF CLEANING TEST PROBE
Document Type and Number:
WIPO Patent Application WO/2011/013383
Kind Code:
A1
Abstract:
Disclosed is a cleaning pad for removing matter stuck to the tip of a test probe used to inspect an electronic circuit. The aforementioned cleaning pad is provided with an abrasive layer (42) which contains a soft base and a fine abrasive agent mixed therein and into which the tip of the test probe is permitted to penetrate and with a surface layer (44) which consists of polymer gel and is laminated on at least one of the surfaces of this abrasive layer (42). The tips of test probes (16, 18) are made to penetrate through the surface layer (44) into the abrasive layer (42), thereby performing cleaning. Even if changes are made in the shapes of the tips of the test probes, changes in penetration resistance can be made small, with the result that variations in the amounts of penetration into the abrasive layer(42) (cleaner layer) are made low, thereby cleaning all test probes in a uniform manner cleaning all test probes in a uniform manner. Furthermore, stuck matter capturing action on the surface is increased, thereby permitting enhancement of test reliability and improvement of product yields.
Inventors:
UTSUMI, Masato (1-5, Minami-nagareyama 8-chome, Nagareyama-sh, Chiba 63, 〒2700163, JP)
内海 正人 (〒63 千葉県流山市南流山８丁目１番５号ＷＩＴ株式会社内 Chiba, 〒2700163, JP)
SEO, Masateru (5-8, Bingo-machi 2-chome, Chuo-ku, Osaka-sh, Osaka 51, 〒5410051, JP)
内海 正人 (〒63 千葉県流山市南流山８丁目１番５号ＷＩＴ株式会社内 Chiba, 〒2700163, JP)
SEO, Masateru (5-8, Bingo-machi 2-chome, Chuo-ku, Osaka-sh, Osaka 51, 〒5410051, JP)
Application Number:
JP2010/004838
Publication Date:
February 03, 2011
Filing Date:
July 30, 2010
Export Citation:
Assignee:
WIT CO., LTD. (1-5 Minami-nagareyama 8-chome, Nagareyama-shi Chiba, 63, 〒2700163, JP)
ＷＩＴ株式会社 (〒63 千葉県流山市南流山８丁目１番５号 Chiba, 〒2700163, JP)
BRIDGESTONE KBG, CO., LTD. (5-8 Bingo-machi 2-chome, Chuo-ku Osaka-sh, Osaka 51, 〒5410051, JP)
ブリヂストンケービージー株式会社 (〒51 大阪府大阪市中央区備後町２丁目５番８号 Osaka, 〒5410051, JP)
UTSUMI, Masato (1-5, Minami-nagareyama 8-chome, Nagareyama-sh, Chiba 63, 〒2700163, JP)
ＷＩＴ株式会社 (〒63 千葉県流山市南流山８丁目１番５号 Chiba, 〒2700163, JP)
BRIDGESTONE KBG, CO., LTD. (5-8 Bingo-machi 2-chome, Chuo-ku Osaka-sh, Osaka 51, 〒5410051, JP)
ブリヂストンケービージー株式会社 (〒51 大阪府大阪市中央区備後町２丁目５番８号 Osaka, 〒5410051, JP)
UTSUMI, Masato (1-5, Minami-nagareyama 8-chome, Nagareyama-sh, Chiba 63, 〒2700163, JP)
International Classes:
G01R31/28; B24D3/00; B24D11/00; G01R1/06; H01L21/66
Attorney, Agent or Firm:
YAMADA, Fumio et al. (Ohba Bldg. A 2F, 28-4 Maruyama-cho, Shibuya-k, Tokyo 44, 〒1500044, JP)