Title:
CLEANING SYSTEM OF SULFURIC ACID RECYCLING TYPE AND PERSULFURIC ACID FEEDER OF SULFURIC ACID RECYCLING TYPE
Document Type and Number:
WIPO Patent Application WO/2006/030816
Kind Code:
A1
Abstract:
A system for cleaning with persulfuric acid which makes it possible to enhance the persulfuric acid concentration and thereby attain higher cleaning effect and which permits the continuation of cleaning; and a feeder for feeding persulfuric acid into a cleaning apparatus. The feeder is provided with an electrolysis vessel (10) for forming persulfate ions by electrolysis from sulfate ions contained in a solution and thus regenerating a persulfuric acid solution, and lines (4), (5) and (6) for circulating a persulfuric acid solution between a cleaning tank (1) and the electrolysis vessel (10). The system is constituted of the above feeder and a cleaning tank (1) for cleaning a member (30) to be cleaned by the use of a persulfuric acid (2) as the cleaning fluid.
Inventors:
NAGAI TATSUO (JP)
IKEMIYA NORIHITO (JP)
YAMAKAWA HARUYOSHI (JP)
KOBAYASHI HIDEKI (JP)
MORITA HIROSHI (JP)
IKEMIYA NORIHITO (JP)
YAMAKAWA HARUYOSHI (JP)
KOBAYASHI HIDEKI (JP)
MORITA HIROSHI (JP)
Application Number:
PCT/JP2005/016916
Publication Date:
March 23, 2006
Filing Date:
September 14, 2005
Export Citation:
Assignee:
KURITA WATER IND LTD (JP)
NAGAI TATSUO (JP)
IKEMIYA NORIHITO (JP)
YAMAKAWA HARUYOSHI (JP)
KOBAYASHI HIDEKI (JP)
MORITA HIROSHI (JP)
NAGAI TATSUO (JP)
IKEMIYA NORIHITO (JP)
YAMAKAWA HARUYOSHI (JP)
KOBAYASHI HIDEKI (JP)
MORITA HIROSHI (JP)
International Classes:
C25D1/22; B08B3/08; C25B1/28; H01L21/304
Foreign References:
| JP2001192874A | 2001-07-17 | |||
| JPH07256260A | 1995-10-09 | |||
| JP2004174485A | 2004-06-24 | |||
| JP2000164550A | 2000-06-16 | |||
| JPH02159029A | 1990-06-19 | |||
| JP2003511555A | 2003-03-25 |
Other References:
See also references of EP 1801265A4
None
None
Attorney, Agent or Firm:
Yokoi, Koki (4-11 Mita 3-chome Minato-ku, Tokyo, JP)
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