Title:
CLEANROOM
Document Type and Number:
WIPO Patent Application WO/2011/142233
Kind Code:
A1
Abstract:
A wall unit (131) separates the outside and the inside of a cleanroom (101). An air conditioning unit (160) conditions the air to be cleaner inside than outside of the cleanroom (101), and to have an air pressure higher inside than outside thereof. An opening (141) is positioned in a portion of the wall unit (131). A conveyer (600) is positioned outside and inside of the cleanroom (101) on either side of the wall unit (131) so as to convey a substrate (400) through the opening (141). Inside of the cleanroom (101) on the wall unit (131), a rectifier (700, 710), which is disposed at the edge of the opening (141) facing at least one main surface of the substrate (400) conveyed by the conveyor (600), increases the velocity of the airflow (171, 172) generated by the air pressure difference between the inside and outside of the cleanroom (101) caused by the air conditioning unit (160).
Inventors:
ENDOH, Hitoshi (())
Application Number:
JP2011/059922
Publication Date:
November 17, 2011
Filing Date:
April 22, 2011
Export Citation:
Assignee:
SHARP KABUSHIKI KAISHA (22-22, Nagaike-cho Abeno-ku, Osaka-sh, Osaka 22, 〒5458522, JP)
シャープ株式会社 (〒22 大阪府大阪市阿倍野区長池町２２番２２号 Osaka, 〒5458522, JP)
シャープ株式会社 (〒22 大阪府大阪市阿倍野区長池町２２番２２号 Osaka, 〒5458522, JP)
International Classes:
F24F7/06
Attorney, Agent or Firm:
Fukami Patent Office, p.c. (Nakanoshima Central Tower, 2-7 Nakanoshima 2-chome, Kita-ku, Osaka-sh, Osaka 05, 〒5300005, JP)
Claims: