Title:
CLUSTER TOOL PROCESS CHAMBER HAVING INTEGRATED HIGH PRESSURE AND VACUUM CHAMBERS
Document Type and Number:
WIPO Patent Application WO2006039133
Kind Code:
A8
Abstract:
A cluster tool includes a transfer chamber connected to a plurality of vacuum chambers. An additional process chamber connected to the transfer chamber includes a high pressure chamber assembly seated on a housing. The high pressure chamber assembly, which is adjustable between an open position and a closed position, includes an upper chamber portion and a lower chamber portion. Hydraulic cylinders mounted on the upper chamber portion and having chamber rods that attach to the lower chamber portion are configured to move the lower chamber relative to the upper chamber portion between the two positions. When the two portions are brought together into the closed, the high pressure chamber assembly forms a high pressure chamber suitable for processing wafers with supercritical CO2. Once the high pressure chamber is formed, a region between lower chamber portion and a housing may be evacuated to form a vacuum chamber outside a portion of the high pressure chamber.
Inventors:
KROEKER TONY R (US)
Application Number:
PCT/US2005/033508
Publication Date:
June 29, 2006
Filing Date:
September 21, 2005
Export Citation:
Assignee:
LAM RES CORP (US)
International Classes:
C23G1/00; B08B3/00; B08B5/04
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