Title:
COATED SPHERICAL SILICON NANOPARTICLE THIN FILM UV DETECTOR WITH UV RESPONSE AND METHOD OF MAKING
Document Type and Number:
WIPO Patent Application WO2004077526
Kind Code:
A3
Abstract:
A UV detector (10) has a UV detection thin film of coated spherical silicon nanoparticles formed upon a substrate (12). The detector includes structures to bias the thin film. In preferred embodiments, a thin conductor (18) that is at least semi-transparent to UV radiation is formed over the thin film. In preferred embodiments, the UV detector is formed as a silicon based integration, upon a device quality silicon wafer (40).
Inventors:
NAYFEH MUNIR H (US)
NAYFEH OSAMA M (US)
NAYFEH OSAMA M (US)
Application Number:
PCT/US2004/005643
Publication Date:
December 01, 2005
Filing Date:
February 25, 2004
Export Citation:
Assignee:
UNIV ILLINOIS (US)
NAYFEH MUNIR H (US)
NAYFEH OSAMA M (US)
NAYFEH MUNIR H (US)
NAYFEH OSAMA M (US)
International Classes:
C01B33/02; C01B33/021; C25F3/12; G01J1/04; G01J1/42; B82B3/00; H01L29/06; H01L29/66; H01L31/0352; H01L31/115; H01S5/30; G02B6/02; G02B6/10; H01S3/16; H01S5/04; H01S5/10; (IPC1-7): G01J1/42; G01T1/18; H01J47/02; H01J47/06; H01J47/08; H01L21/00
Foreign References:
| US6239453B1 | 2001-05-29 | |||
| US6479825B1 | 2002-11-12 | |||
| US20020074565A1 | 2002-06-20 | |||
| US5336547A | 1994-08-09 | |||
| US3786321A | 1974-01-15 |
Other References:
CHIU ET AL.: "Gas Phase Synthesis and Processing of Silicon Nanocrytsallites: Characterization by Photoluminescence Emmission Spectroscopy.", JOURNAL OF ELECTRONIC MATERIALS., vol. 23, no. 3, 1994, pages 347 - 354, XP008102373
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