Title:
COATING APPARATUS AND COATING METHOD
Document Type and Number:
WIPO Patent Application WO/2011/138883
Kind Code:
A1
Abstract:
Disclosed is an inkjet type coating apparatus (101), which coats a substrate (6) with a solution (10) by jetting the solution, said solution forming a thin film on the substrate (6). The coating apparatus (101) is provided with: a supply tank (18) for storing the solution (10); a head (7) for jetting the solution (10) toward the substrate (6); solution supply piping (8), for guiding the solution (10) from the supply tank (18) to the head (7); and a heater (21) which is provided at a position where there is no head (7) so as to increase the temperature of the solution (10) at the time of jetting the solution from the head (7).
Inventors:
NIIHATA, Hiroaki (())
新畑 宏晃 (())
SHIOZAKI, Tadashi (())
新畑 宏晃 (())
SHIOZAKI, Tadashi (())
Application Number:
JP2011/058070
Publication Date:
November 10, 2011
Filing Date:
March 30, 2011
Export Citation:
Assignee:
SHARP KABUSHIKI KAISHA (22-22, Nagaike-cho Abeno-ku, Osaka-sh, Osaka 22, 〒5458522, JP)
シャープ株式会社 (〒22 大阪府大阪市阿倍野区長池町２２番２２号 Osaka, 〒5458522, JP)
NIIHATA, Hiroaki (())
新畑 宏晃 (())
シャープ株式会社 (〒22 大阪府大阪市阿倍野区長池町２２番２２号 Osaka, 〒5458522, JP)
NIIHATA, Hiroaki (())
新畑 宏晃 (())
International Classes:
B05C5/00; B05C11/10; B05D1/26; B05D3/00; B41J2/175; G02F1/13
Attorney, Agent or Firm:
Fukami Patent Office, p.c. (Nakanoshima Central Tower, 2-7 Nakanoshima 2-chome, Kita-ku, Osaka-sh, Osaka 05, 〒5300005, JP)
Claims:
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