COATING APPARATUS AND COATING METHOD

WIPO Patent Application WO/2018/037670

A1

The present coating apparatus is provided with: a back-up roller (10) for holding a substrate; a driving unit for rotating the back-up roller (10); a nozzle (41) for discharging a coating liquid toward the surface of the substrate that is held on the back-up roller (10); and a heating part for heating the coating liquid applied on the surface of the substrate. Said coating apparatus is also provided with a gas-blowing unit (42) for blowing a gas near the discharge port (411) of the nozzle (41). As a result, even if the solvent from the coating liquid is vaporized near the discharge port (411), the gas containing the vapor of said solvent is replaced with gas discharged from the gas-blowing unit (42). Accordingly, it is possible to limit the condensation of the solvent vaporized from the coating liquid in the vicinity of the discharge port (411) of the nozzle (41), thereby making it possible to limit defective discharge of the coating liquid due to condensation of the solvent.

JP3340238	[Title of Invention] Intermittent coating method
JP5362232	Board processing equipment
JP2001224997	DEVICE AND METHOD FOR COATING SLURRY LIQUID

KAWAKAMI TAKUTO (JP)
TAKAGI YOSHINORI (JP)
OKADA HIROSHI (JP)

PCT/JP2017/021296

March 01, 2018

June 08, 2017

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SCREEN HOLDINGS CO LTD (JP)

B05C5/02; B05C9/14; B05C11/00; B05D1/26; B05D3/02; B05D7/00; H01M4/88; H01M8/02; H01M8/10

JP2012139682A	2012-07-26
JP2016046091A	2016-04-04
JP2004351413A	2004-12-16
JP2014207218A	2014-10-30

NISHIDA Takami (JP)

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