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Patent Searching and Data


Title:
COATING APPARATUS
Document Type and Number:
WIPO Patent Application WO/2020/170356
Kind Code:
A1
Abstract:
A coating apparatus comprising: a syringe, which is filled with a coating material to be used in producing an electronic substrate and discharges the coating material at a positive pressure; a sensor for measuring the internal pressure of the syringe; a first negative pressure tubing, which is connected to the syringe and is for conducting negative pressure for reducing the internal pressure of the syringe to the syringe; a second negative pressure tubing, which has a smaller flow rate than the first negative pressure tubing, branches from the first negative pressure tubing, and connects to the syringe; a switching part, which supplies negative pressure to the syringe via the first negative pressure tubing and/or the second negative pressure tubing by opening and closing the first negative pressure tubing and the second negative pressure tubing; and a control part for forming a path for removing positive pressure from the syringe by operating the switching part immediately after the syringe discharges the coating material as well as for changing the path for removing positive pressure from the syringe by operating the switching part when the value measured by the sensor decreases to a first prescribed value.

Inventors:
HAYASHI KENICHI (JP)
ASAI RYO (JP)
Application Number:
PCT/JP2019/006286
Publication Date:
August 27, 2020
Filing Date:
February 20, 2019
Export Citation:
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Assignee:
FUJI CORP (JP)
International Classes:
B05C5/00; B05C11/10
Foreign References:
JP2006192371A2006-07-27
JPH11290745A1999-10-26
JP2013193077A2013-09-30
Attorney, Agent or Firm:
NEXT INTERNATIONAL et al. (JP)
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