Title:
COATING APPARATUS
Document Type and Number:
WIPO Patent Application WO/2020/174513
Kind Code:
A1
Abstract:
Provided is a coating apparatus capable of inhibiting the charging of substrates. Specifically, this coating apparatus comprises a stage unit for holding a substrate and a coating unit for applying a coating solution on the substrate on the stage unit and forms a coating film on the substrate by discharging the coating solution from the coating unit while moving the substrate held on the stage unit relative to the coating unit, the stage unit comprising a levitating stage section for levitating the substrate and an adhesion holding section for holding the substrate through adhesion, and being configured such that, in a condition in which the substrate levitated on the levitating stage section is held by the adhesion holding section, the levitating stage section and the adhesion holding section are moved as a unit relative to the coating unit between a substrate-exchanging position where substrates are conveyed in and out and a coating position where the coating solution is applied on the substrate.
Inventors:
FUKUSHIMA YUGO (JP)
MORI TOSHIHIRO (JP)
MORI TOSHIHIRO (JP)
Application Number:
PCT/JP2019/006947
Publication Date:
September 03, 2020
Filing Date:
February 25, 2019
Export Citation:
Assignee:
TORAY ENG CO LTD (JP)
International Classes:
B05C5/00; B05C13/00; B65G49/06; B65G49/07; H01L21/683
Domestic Patent References:
| WO2017163887A1 | 2017-09-28 | |||
| WO2013031222A1 | 2013-03-07 |
Foreign References:
| JP2009147240A | 2009-07-02 | |||
| JP2008147292A | 2008-06-26 | |||
| JP2008289966A | 2008-12-04 | |||
| JP2005272039A | 2005-10-06 |
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