Title:
COATING DEVICE AND HEAD UNIT
Document Type and Number:
WIPO Patent Application WO/2020/196355
Kind Code:
A1
Abstract:
This coating device applies, with a prescribed thickness, to a surface of a to-be-processed substrate supported by a substrate support mechanism, a coating liquid discharged through an opening which is formed at a leading end facing the surface of the to-be-processed substrate and which extends in a slit shape in a first direction, the coating device being provided with: a die head mechanism which comprises a pair of inner wall surfaces extending in the first direction opposingly to each other with a prescribed gap therebetween so as to form a flow path through which the coating liquid flows from a storage part, which extends in the first direction so as to temporarily store the coating liquid, toward the opening of the leading end; and an opening width measurement mechanism for measuring a change in the gap between the inner wall surfaces in order to detect a change in the width of the opening in a second direction orthogonal to the first direction.
Inventors:
NAITO KAZUO (JP)
KITO YOSHIAKI (JP)
KITO YOSHIAKI (JP)
Application Number:
PCT/JP2020/012578
Publication Date:
October 01, 2020
Filing Date:
March 23, 2020
Export Citation:
Assignee:
NIKON CORP (JP)
International Classes:
B05C11/00; B05C5/02; B05C11/10; G01B11/14; G01B21/16
Foreign References:
| JP2006239664A | 2006-09-14 | |||
| JP2006084323A | 2006-03-30 | |||
| JP2012187554A | 2012-10-04 | |||
| JP2006110486A | 2006-04-27 | |||
| JP2004139814A | 2004-05-13 | |||
| JP2003080152A | 2003-03-18 |
Attorney, Agent or Firm:
NISHIZAWA Kazuyoshi et al. (JP)
Download PDF:
Previous Patent: VEHICLE SENSING DEVICE, PARKING AREA, ROAD, AND VEHICLE SENSING METHOD
Next Patent: λ/4 TYPE RADIOWAVE ABSORBER
Next Patent: λ/4 TYPE RADIOWAVE ABSORBER