Title:
COATING DEVICE AND COATING METHOD
Document Type and Number:
WIPO Patent Application WO/2016/051896
Kind Code:
A1
Abstract:
Provided is a technique for efficiently forming a non-coated region on a substrate. A coating device 1 forms a non-coated region on a substrate P. The coating device 1 is provided with a stage 21 for holding the substrate P, coating nozzles 52a-52c for discharging an organic EL liquid toward the main surface of the substrate P held on the stage 21, a nozzle movement mechanism 51 for moving the coating nozzles 52a-52c relative to the substrate P held on the stage 21, a plurality of plate members 61 having grooves 611 extending in the longitudinal direction, plate holding parts 62, 63 for holding the plate members 61 so as to be disposed between the coating nozzles 52a-52c and the substrate P, and a suction mechanism 64 for suctioning the organic EL liquid discharged on the surface of the holding plate members 61.
Inventors:
SHIOTA AKIHITO (JP)
TAKAMURA YUKIHIRO (JP)
ITO RYUSUKE (JP)
SAGARA SHUICHI (JP)
UENO MASATOSHI (JP)
OE MUNEAKI (JP)
TAKAMURA YUKIHIRO (JP)
ITO RYUSUKE (JP)
SAGARA SHUICHI (JP)
UENO MASATOSHI (JP)
OE MUNEAKI (JP)
Application Number:
PCT/JP2015/069373
Publication Date:
April 07, 2016
Filing Date:
July 06, 2015
Export Citation:
Assignee:
SCREEN HOLDINGS CO LTD (JP)
International Classes:
H05B33/10; B05C5/00; B05C11/10; B05C13/02; B05C21/00; B05D1/26; B05D1/32; H01L51/50
Foreign References:
| JP2004050080A | 2004-02-19 | |||
| JP2011210531A | 2011-10-20 | |||
| JP2010214305A | 2010-09-30 | |||
| JP2001096213A | 2001-04-10 | |||
| JP2008293704A | 2008-12-04 | |||
| JP2010240511A | 2010-10-28 | |||
| JPH07116579A | 1995-05-09 |
Attorney, Agent or Firm:
YOSHITAKE Hidetoshi et al. (JP)
Hidetoshi Yoshitake (JP)
Hidetoshi Yoshitake (JP)
Download PDF: