Title:
COATING DEVICE AND RELATED METHOD
Document Type and Number:
WIPO Patent Application WO2005024892
Kind Code:
A3
Abstract:
The invention relates to a device for coating a support by applying an electric arc (A) to a target in plasma comprising a chamber provided with an anode and cathode which form a target, are spatially separated and connected, in plasma contained in the chamber, by a power supply circuit controlled by a control signal source. Said invention is characterised in that the inventive device also comprises sensor means for collecting and characterising at least one representative parameter of the plasma state, processing means connected to said sensor means for deriving the existence of an arc and the parameter of the state thereof from said representative parameter(s) of the plasma state, a control means for the control signal source which is connected to said processing means and controls the actuation of the control signal of the power supply circuit. A related method is also disclosed.
Inventors:
CHOI PETER (FR)
Application Number:
PCT/FR2004/002220
Publication Date:
December 29, 2005
Filing Date:
September 01, 2004
Export Citation:
Assignee:
ECOLE POLYTECH (FR)
CHOI PETER (FR)
CHOI PETER (FR)
International Classes:
C23C14/32; H01J37/32; (IPC1-7): H01J37/32; C23C14/32
Foreign References:
| US6338779B1 | 2002-01-15 | |||
| US20020046941A1 | 2002-04-25 | |||
| US5514229A | 1996-05-07 |
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