COATING DEVICE FOR SUBSTRATE AND SUBSTRATE-COATING METHOD

WIPO Patent Application WO/2011/080933

A1

The disclosed coating device (10) for a substrate is provided with a precision stage (7), a nozzle (8), and conveyers (3-6, 21). The precision stage (7) is provided with a horizontal mounting surface, on which a substrate (W) is mounted, and is caused to be mobile in a reciprocating fashion between an upstream end and a downstream end along a direction of conveyance. The conveyers (3-6, 21) convey the substrate (W) along a predetermined conveyance direction across the mounting surface of the precision stage (7) in a manner so that the surface of the substrate (W) is positioned in the horizontal plane. An intermediate conveyer (21) is caused to be vertically mobile between a conveying position, wherein the conveyance surface matches the mounting surface of the stage, and a non-conveying position, wherein the conveying surface is below the mounting surface of the stage.

TANABE Masaaki (6186, Kinoko-cho, Ibara-sh, Okayama 03, 〒7158603, JP)
田辺雅明 (〒03 岡山県井原市木之子町６１８６番地　タツモ株式会社内 Okayama, 〒7158603, JP)
HIRATA Hideo (6186, Kinoko-cho, Ibara-sh, Okayama 03, 〒7158603, JP)

JP2010/059429

July 07, 2011

June 03, 2010

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TAZMO CO., LTD. (6186, Kinoko-cho Ibara-sh, Okayama 03, 〒7158603, JP)
タツモ株式会社 (〒03 岡山県井原市木之子町６１８６番地 Okayama, 〒7158603, JP)
TANABE Masaaki (6186, Kinoko-cho, Ibara-sh, Okayama 03, 〒7158603, JP)
田辺雅明 (〒03 岡山県井原市木之子町６１８６番地　タツモ株式会社内 Okayama, 〒7158603, JP)

H01L21/027; B05C5/02; B05C13/00; B05D3/00

Kaede Patent Attoneys' Office (1-4-34, Noninbashi Chuo-k, Osaka-shi Osaka 11, 〒5400011, JP)

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