Title:
COATING FILM INSPECTION APPARATUS AND INSPECTION METHOD
Document Type and Number:
WIPO Patent Application WO/2011/105040
Kind Code:
A1
Abstract:
A coating film inspection apparatus is provided with a terahertz wave generator which generates a terahertz wave, an irradiation optical system which irradiates a sample on which a film is formed with the terahertz wave, a terahertz wave detector which detects the terahertz wave reflected by the sample, and a control unit which represents the electric field intensity of the detected terahertz wave as time-axis waveform data, detects a plurality of peaks from the waveform data, and calculates the film thickness on the basis of the time difference between the peaks.
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Inventors:
OHTAKE HIDEYUKI (JP)
UEHARA YUZURU (JP)
TAKAYANAGI JUN (JP)
UEHARA YUZURU (JP)
TAKAYANAGI JUN (JP)
Application Number:
PCT/JP2011/000950
Publication Date:
September 01, 2011
Filing Date:
February 21, 2011
Export Citation:
Assignee:
AISIN SEIKI (JP)
OHTAKE HIDEYUKI (JP)
UEHARA YUZURU (JP)
TAKAYANAGI JUN (JP)
OHTAKE HIDEYUKI (JP)
UEHARA YUZURU (JP)
TAKAYANAGI JUN (JP)
International Classes:
G01B11/06; G01N21/3563; G01N21/3586; G01N21/88; G01N21/95
Foreign References:
| JP4046158B2 | 2008-02-13 | |||
| JP2006153845A | 2006-06-15 | |||
| JPH09259435A | 1997-10-03 | |||
| JP2004340763A | 2004-12-02 | |||
| JP2004101257A | 2004-04-02 | |||
| JP2009075069A | 2009-04-09 | |||
| JP2009200461A | 2009-09-03 | |||
| JP3214190B2 | 2001-10-02 | |||
| JP4084817B2 | 2008-04-30 | |||
| JPH0446158B2 | 1992-07-29 | |||
| JP2009069138A | 2009-04-02 | |||
| JP2008246347A | 2008-10-16 | |||
| JPH05288690A | 1993-11-02 | |||
| JP2010042492A | 2010-02-25 | |||
| JP2010281408A | 2010-12-16 |
Other References:
See also references of EP 2538200A4
Attorney, Agent or Firm:
OKABE, Yuzuru et al. (JP)
Okabe 讓 (JP)
Okabe 讓 (JP)
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Claims: