Title:
COATING FILM STATE ANALYSIS DEVICE AND FILM THICKNESS MEASUREMENT DEVICE
Document Type and Number:
WIPO Patent Application WO/2018/185891
Kind Code:
A1
Abstract:
A coating film state analysis device comprising an acquisition unit for acquiring surface data pertaining to a to-be-coated region, a sorting unit for sorting from the surface data acquired by the acquisition unit into post-coating-operation surface data and pre-coating-operation surface data, and an analysis unit for analyzing the state of a coating film formed in the to-be-coated region on the basis of the post-coating-operation surface data and the pre-coating-operation surface data sorted by the sorting unit.
Inventors:
KAYABA HIROYUKI (JP)
Application Number:
PCT/JP2017/014278
Publication Date:
October 11, 2018
Filing Date:
April 05, 2017
Export Citation:
Assignee:
NIKON CORP (JP)
International Classes:
G01B21/08; B05C11/00; G01B11/02; G01N21/27
Domestic Patent References:
| WO2013081151A1 | 2013-06-06 | |||
| WO2001031293A1 | 2001-05-03 |
Foreign References:
| JP2016080695A | 2016-05-16 | |||
| US20130260016A1 | 2013-10-03 | |||
| JP2002508076A | 2002-03-12 |
Attorney, Agent or Firm:
NAGAI, Fuyuki et al. (JP)
Download PDF: