COATING METHOD FOR REDUCING DAMAGE TO BARRIER LAYER

WIPO Patent Application WO/2014/084685

A1

The present application relates to a coating method for reducing the damage to a barrier layer. A barrier film of the present invention can improve a gas barrier property by inhibiting the deterioration of water permeability through a coating method without having direct contact with a barrier layer in the carrying out of protective coating for protecting the barrier layer of the barrier film.

KIM DONG RYUL (KR)
HWANG JANG YEON (KR)
LEE SEONG HWAN (KR)
RYU SANG UK (KR)
KIM JOON HYUNG (KR)
SON BEOM GWON (KR)
LEE HYUN JI (KR)

PCT/KR2013/011040

June 05, 2014

November 29, 2013

Click for automatic bibliography generation  

LG CHEMICAL LTD (KR)

C23C26/00

WO2003087247A1

2003-10-23

KR20080036042A	2008-04-24
KR20120061906A	2012-06-13
KR20090077801A	2009-07-15
US20120021236A1	2012-01-26
US20060165886A1	2006-07-27
US4198465A	1980-04-15
US3708225A	1973-01-02
US4177315A	1979-12-04
US4309319A	1982-01-05
US4436851A	1984-03-13
US4455205A	1984-06-19
US0142362A	1873-09-02
EP1418197A1	2004-05-12

See also references of EP 2927346A4
TUOMO SUNTOLA: "Atomic Layer Epitaxy", THIN SOLID FILMS, vol. 216, 1992, pages 84 - 89
M. LESKELA; M. RITALA: "ALD precursor chemistry: Evolution and future challenges", JOURNAL DE PHYSIQUE IV, vol. 9, 1999, pages 837 - 852, XP008006493

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