Title:
COATING SYSTEM
Document Type and Number:
WIPO Patent Application WO/2019/216060
Kind Code:
A1
Abstract:
Provided is a coating system with which it is possible to conduct maintenance work while minimizing environmental variation in a chamber part and to improve production efficiency by expediting restoration of a coating environment. More specifically, this coating system has: a stage part on which a substrate is to be placed; a gantry unit which is equipped with an applicator for applying a coating liquid to the substrate on the stage part; a maintenance unit which performs maintenance work on a coating liquid discharge side of the applicator; and a chamber part for housing the aforementioned part and units in a sealed state. The gantry unit has a gate plate part having a gate section through which the applicator can be passed as the applicator is hoisted and lowered. The maintenance unit has a seal part that, by coming into abutment on the gate plate part so as to block up the gate section, partitions the chamber part into an access chamber section located above the gate plate part and a body-side chamber section located below the gate plate part in such a manner as to seal off those partitioned chamber sections from each other.
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Inventors:
HASHIMOTO HIROYUKI (JP)
Application Number:
PCT/JP2019/014579
Publication Date:
November 14, 2019
Filing Date:
April 02, 2019
Export Citation:
Assignee:
TORAY ENG CO LTD (JP)
International Classes:
B05C11/00; B05C5/00; B05C15/00
Foreign References:
| JP2011088101A | 2011-05-06 | |||
| JP2008246455A | 2008-10-16 |
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