Title:
COATING TREATMENT DEVICE, COATING TREATMENT METHOD AND COMPUTER STORAGE MEDIUM
Document Type and Number:
WIPO Patent Application WO/2018/003426
Kind Code:
A1
Abstract:
This coating treatment device, for coating a substrate with a coating solution that contains an optical material, is provided with a holding unit which holds the substrate, an application nozzle which discharges a coating solution onto the substrate held by the holding unit, and a movement mechanism which moves the holding unit and the application nozzle relative to each other in orthogonal directions, wherein the coating solution can be coated onto the substrate efficiently and suitably at any angle.
Inventors:
IKEDA FUMIHIKO (JP)
Application Number:
PCT/JP2017/020963
Publication Date:
January 04, 2018
Filing Date:
June 06, 2017
Export Citation:
Assignee:
TOKYO ELECTRON LTD (JP)
International Classes:
G02B5/30
Domestic Patent References:
| WO2016051896A1 | 2016-04-07 | |||
| WO2004079413A1 | 2004-09-16 |
Foreign References:
| JP2008180809A | 2008-08-07 | |||
| JP2009031627A | 2009-02-12 | |||
| JP2012203205A | 2012-10-22 | |||
| JP2004050080A | 2004-02-19 |
Attorney, Agent or Firm:
KANEMOTO, Tetsuo et al. (JP)
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