Title:
COATING TREATMENT DEVICE, COATING TREATMENT METHOD, AND OPTICAL FILM FORMATION DEVICE
Document Type and Number:
WIPO Patent Application WO/2018/198863
Kind Code:
A1
Abstract:
A coating treatment device (10) comprises: substrate movement units (12, 13) that hold a substrate and move the substrate in the horizontal direction; an oblong coating nozzle (14) that extends in a direction orthogonal to the direction of movement of the substrate movement units, and discharges a coating liquid onto the substrate held by the substrate movement units; a coating nozzle movement unit (16) that moves the coating nozzle in the direction in which the coating nozzle extends; and a control unit (18) that controls the direction in which the substrate held by the substrate movement units is coated by controlling the movement speed of the substrate movement units and the coating nozzle movement unit.
Inventors:
IKEMOTO DAISUKE (JP)
Application Number:
PCT/JP2018/015741
Publication Date:
November 01, 2018
Filing Date:
April 16, 2018
Export Citation:
Assignee:
TOKYO ELECTRON LTD (JP)
International Classes:
B05C5/02; B05C11/10; B05C13/02; B05D1/26; B05D5/06; G02B5/30
Domestic Patent References:
| WO2018003426A1 | 2018-01-04 |
Foreign References:
| JP2007061784A | 2007-03-15 | |||
| JP2011167655A | 2011-09-01 | |||
| JP2008170844A | 2008-07-24 | |||
| JP2014063700A | 2014-04-10 |
Attorney, Agent or Firm:
SAKAI INTERNATIONAL PATENT OFFICE (JP)
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