Title:
COLD-EMISSION FILM-TYPE CATHODE AND METHOD FOR PRODUCING THE SAME
Document Type and Number:
WIPO Patent Application WO1999060597
Kind Code:
A9
Abstract:
The present invention may be used in the production of highly efficient films for electron field emitters. The cold-emission cathode of the present invention comprises a substrate having a carbon film with an irregular structure applied thereon. This structure comprises carbon micro- and nano-ridges and/or micro- and nano-threads which are perpendicular to the surface of the substrate, which have a characteristic scale of between 0.01 and 1 micron as well as a distribution density of between 0.1 and 100 mu m, and which are coated with a diamond nano-film whose thickness represents a fraction of a micron. The method for producing the cathode involves sequentially depositing two carbon films. A carbon film with nano-barbs is first deposited on a substrate arranged on an anode by igniting a direct-current discharge at a density of between 0.15 and 0.5 A. This deposition is carried out in a mixture containing hydrogen and a carbon-containing additive, under a global pressure of between 50 and 300 torrs, using vapours of ethylic alcohol at a 5 to 15 % concentration or vapours of methane at a 6 to 30 % concentration, and at a temperature on the substrate of between 600 and 1100 DEG C. A diamond nano-film is then deposited on the graphite film thus grown.
Inventors:
BLYABLIN ALEXANDR ALEXANDROVIC (RU)
KANDIDOV ANTON VALERIEVICH (RU)
TIMOFEEV MIKHAIL ARKADIEVICH (RU)
SELEZNEV BORIS VADIMOVICH (RU)
PILEVSKY ANDREI ALEXANDROVICH (RU)
RAKHIMOV ALEXANDR TURSUNOVICH (RU)
SUETIN NIKOLAI VLADISLAVOVICH (RU)
SAMORODOV VLADIMIR ANATOLIEVIC (RU)
KANDIDOV ANTON VALERIEVICH (RU)
TIMOFEEV MIKHAIL ARKADIEVICH (RU)
SELEZNEV BORIS VADIMOVICH (RU)
PILEVSKY ANDREI ALEXANDROVICH (RU)
RAKHIMOV ALEXANDR TURSUNOVICH (RU)
SUETIN NIKOLAI VLADISLAVOVICH (RU)
SAMORODOV VLADIMIR ANATOLIEVIC (RU)
Application Number:
PCT/RU1999/000166
Publication Date:
February 24, 2000
Filing Date:
May 19, 1999
Export Citation:
Assignee:
BLYABLIN ALEXANDR ALEXANDROVIC (RU)
KANDIDOV ANTON VALERIEVICH (RU)
TIMOFEEV MIKHAIL ARKADIEVICH (RU)
SELEZNEV BORIS VADIMOVICH (RU)
PILEVSKY ANDREI ALEXANDROVICH (RU)
RAKHIMOV ALEXANDR TURSUNOVICH (RU)
SUETIN NIKOLAI VLADISLAVOVICH (RU)
SAMORODOV VLADIMIR ANATOLIEVIC (RU)
KANDIDOV ANTON VALERIEVICH (RU)
TIMOFEEV MIKHAIL ARKADIEVICH (RU)
SELEZNEV BORIS VADIMOVICH (RU)
PILEVSKY ANDREI ALEXANDROVICH (RU)
RAKHIMOV ALEXANDR TURSUNOVICH (RU)
SUETIN NIKOLAI VLADISLAVOVICH (RU)
SAMORODOV VLADIMIR ANATOLIEVIC (RU)
International Classes:
H01J1/304; H01J9/02; H01J1/30; (IPC1-7): H01J1/30; H01J9/02
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