COLD PLASMA GLOW DISCHARGING GENERATOR IN LOW-VACUUM STATE

WIPO Patent Application WO/2014/086130

A1

A cold plasma glow discharging generator in a low-vacuum state comprises a plasma treatment apparatus disposed in a cavity with an adjustable vacuum degree. The apparatus comprises an insulative support, a discharging apparatus, a driving roll, a driven roll, a compression roll, and a conveyor belt. The driving roll and the driven roll are separately disposed on two ends of the insulative support by using a bearing. The conveyor belt is disposed on the driving roll and the driven roll. The compression roll is also disposed on one end of the insulative support by using the bearing, and compresses the conveyor belt on the driving roll. The discharging apparatus is disposed on the insulative support. The conveyor belt passes through inside the discharging apparatus. In the apparatus, by improving a pole plate structure in the discharging apparatus, a metal suspension screening housing and an insulative filling material are added, thereby preventing discharging between the pole plate and an inner wall of the cavity; and displacement current is generated, thereby improving the activity of the plasma.

JP2021048194	ETCHING DEVICE AND ETCHING METHOD
JP2016225203	PLASMA PROCESSING DEVICE
JP2002231650	ION PROCESSOR

DONG YUANHUA (CN)
SHAO HANLIANG (CN)
QIAN HAIBO (CN)
MIAO QIN (CN)

PCT/CN2013/073336

June 12, 2014

March 28, 2013

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INST SOIL SCIENCE CAS (CN)
CHANGZHOU ZHONGKE CHANGTAI PLASMA TECHNOLOGY CO LTD (CN)

H05H1/46

CN100446653C	2008-12-31
CN2870385Y	2007-02-14
CN201880526U	2011-06-29
CN101669416A	2010-03-17
CN2682773Y	2005-03-02
JPH09320966A	1997-12-12
JP2003142298A	2003-05-16

NANJING JINGWEI PATENT & TRADEMARK AGENCY CO., LTD (CN)
南京经纬专利商标代理有限公司 (CN)

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