Title:
COLLECTOR MIRROR ASSEMBLY AND EXTREME ULTRAVIOLET LIGHT SOURCE DEVICE USING SAID COLLECTOR MIRROR ASSEMBLY
Document Type and Number:
WIPO Patent Application WO/2011/111582
Kind Code:
A1
Abstract:
Deterioration of collector performance due to heat deformation of the collector mirror assembly in the disclosed extreme ultraviolet light source device is prevented. The collector mirror assembly used in the extreme ultraviolet light source device comprises multiple reflective shells (21) of different diameters shaped as hyperboloids of revolution or ellipsoids of revolution. Said reflective shells (21) are arranged in a nested fashion, and the ends thereof are held by a holding structure (22). A cooling channel through which a coolant flows is mounted on a reflective shell (21) in the axis direction thereof on the back side of the reflective surface. This cooling channel functions as a reinforcement material, and can suppress heat deformation of the reflective shells (21). Further, by using molybdenum as the material of the reflective shells (21), heat deformation can be further suppressed, and by creating a cooling channel in the holding structure (22), the collector lens assembly can further be more efficiently cooled and the heat deformation thereof suppressed.
Inventors:
SATO HIROTO (JP)
Application Number:
PCT/JP2011/054753
Publication Date:
September 15, 2011
Filing Date:
March 02, 2011
Export Citation:
Assignee:
USHIO ELECTRIC INC (JP)
SATO HIROTO (JP)
SATO HIROTO (JP)
International Classes:
H01L21/027; G03F7/20; H05G2/00
Domestic Patent References:
| WO2009095220A2 | 2009-08-06 | |||
| WO2009095220A2 | 2009-08-06 |
Foreign References:
| JP2004165638A | 2004-06-10 | |||
| JP2005310922A | 2005-11-04 | |||
| JP2007285909A | 2007-11-01 | |||
| JP4105616B2 | 2008-06-25 |
Other References:
See also references of EP 2546864A4
Attorney, Agent or Firm:
NAGASAWA Shunichirou (JP)
Shunichiro Nagasawa (JP)
Shunichiro Nagasawa (JP)
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Claims: