Title:
COLLIMATION EVALUATION DEVICE AND COLLIMATION EVALUATION METHOD
Document Type and Number:
WIPO Patent Application WO/2016/017706
Kind Code:
A1
Abstract:
When light that has passed through a second reflective member 20 is incident on a first reflective member 10, part of said light is reflected by a first reflective surface 11, the part of said light that passed through the first reflective surface 11 is reflected by a second reflective surface 12, and these reflected-light components are outputted in opposite directions. When the light outputted from the first reflective member 10 is incident on the second reflective member 20, part of said light is reflected by a first reflective surface 21, the part of said light that passed through the first reflective surface 21 is reflected by a second reflective surface 22, and these reflected-light components are outputted. The light L12 reflected by the first reflective surface 11 of the first reflective member 10 and the second reflective surface 22 of the second reflective member 20 and the light L21 reflected by the second reflective surface 12 of the first reflective member 10 and the first reflective surface 21 of the second reflective member 20 form an interference pattern on a screen 30. This implements a device and a method whereby the collimation of light can be evaluated with high sensitivity even if the coherence length of said light is short.
Inventors:
OKUMA JUNJI (JP)
IGASAKI YASUNORI (JP)
IGASAKI YASUNORI (JP)
Application Number:
PCT/JP2015/071528
Publication Date:
February 04, 2016
Filing Date:
July 29, 2015
Export Citation:
Assignee:
HAMAMATSU PHOTONICS KK (JP)
International Classes:
G01J9/02; G01B9/02; G01M11/00
Foreign References:
| US20040051877A1 | 2004-03-18 | |||
| JP2009103592A | 2009-05-14 |
Other References:
STAUB F ET AL.: "Collimation tester for ultrashort pulses and short coherence length lasers", OPTIK, vol. 117, no. 4, April 2006 (2006-04-01), pages 193 - 195, XP025192406, DOI: doi:10.1016/j.ijleo.2005.08.006
SRIRAM K V ET AL.: "Self-referencing collimation testing techniques", OPTICAL ENGINEERING, vol. 32, no. 1, January 1993 (1993-01-01), pages 94 - 100, XP000336032, DOI: doi:10.1117/12.60081
XU D Y ET AL.: "Rotatable single wedge plate shearing interference technique for collimation testing", OPTICAL ENGINEERING, vol. 30, no. 4, April 1991 (1991-04-01), pages 391 - 396, XP000202157
LI G H ET AL.: "Improved wedge-plate shearing interferometric technique for a collimation test", APPLIED OPTICS, vol. 31, no. 22, pages 4363 - 4364, XP000292079
See also references of EP 3176552A4
SRIRAM K V ET AL.: "Self-referencing collimation testing techniques", OPTICAL ENGINEERING, vol. 32, no. 1, January 1993 (1993-01-01), pages 94 - 100, XP000336032, DOI: doi:10.1117/12.60081
XU D Y ET AL.: "Rotatable single wedge plate shearing interference technique for collimation testing", OPTICAL ENGINEERING, vol. 30, no. 4, April 1991 (1991-04-01), pages 391 - 396, XP000202157
LI G H ET AL.: "Improved wedge-plate shearing interferometric technique for a collimation test", APPLIED OPTICS, vol. 31, no. 22, pages 4363 - 4364, XP000292079
See also references of EP 3176552A4
Attorney, Agent or Firm:
HASEGAWA Yoshiki et al. (JP)
Yoshiki Hasegawa (JP)
Yoshiki Hasegawa (JP)
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