COMBINE APPARATUS OF SCANNING ELECTRON MICROSCOPE AND ENERGY DISPERSIVE X-RAY SPECTROSCOPY

Title:

COMBINE APPARATUS OF SCANNING ELECTRON MICROSCOPE AND ENERGY DISPERSIVE X-RAY SPECTROSCOPY

Document Type and Number:

WIPO Patent Application WO/2012/141396

Kind Code:

A1

Abstract:

Disclosed is a combine apparatus of a scanning electron microscope and an energy dispersive x-ray spectroscopy in that the scanning electron microscope and the energy dispersive x-ray are combined, whereby unifying as one apparatus. The combine apparatus of the scanning electron microscope and the energy dispersive x-ray spectroscopy includes: an image generation means for detecting electrons emitted from a sample for measuring a shape of the sample and simultaneously generating a scanning electron microscope image for analyzing an x-ray; a controller for generating a display control signal and a specific position storing control signal of the image generated from the image generation means; and an x-ray measuring circuit for accumulating an energy level on a specific position of the image generated from the image generation means according to the specific position storing control signal generated by the controller to provide an element information thereof.

Inventors:

LEE JUN-HEE (KR)

Application Number:

PCT/KR2011/007773

Publication Date:

October 18, 2012

Filing Date:

October 19, 2011

Export Citation:

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Assignee:

COXEM CO LTD (KR)
LEE JUN-HEE (KR)

International Classes:

H01J37/28; G01N23/225

Foreign References:

JPH07248217A	1995-09-26
JPH08226904A	1996-09-03
KR20030000056A	2003-01-06
JPH10260144A	1998-09-29

Other References: