Title:
COMBINED INSPECTION SYSTEM
Document Type and Number:
WIPO Patent Application WO/2018/016430
Kind Code:
A1
Abstract:
This combined inspection system is an inspection system including a first inspecting device (1) which inspects a specimen (11) on the basis of X-ray measured data obtained by irradiating the specimen (11) with X-rays, and a second inspecting device (2) which inspects the specimen (11) using a measuring technique that does not employ X-rays. The X-ray measured data obtained by the first inspecting device (1), or an analysis result of the X-ray measured data, are output to the second inspecting device (2). Furthermore, the second inspecting device (2) utilizes the X-ray measured data input from the first inspecting device (1), or the analysis result of the X-ray measured data, to analyze the structure of the specimen (11).
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Inventors:
OGATA KIYOSHI (JP)
OMOTE KAZUHIKO (JP)
ITO YOSHIYASU (JP)
OMOTE KAZUHIKO (JP)
ITO YOSHIYASU (JP)
Application Number:
PCT/JP2017/025676
Publication Date:
January 25, 2018
Filing Date:
July 14, 2017
Export Citation:
Assignee:
RIGAKU DENKI CO LTD (JP)
International Classes:
G01N23/201; G01N23/203
Domestic Patent References:
| WO2015066040A1 | 2015-05-07 |
Foreign References:
| JP2012237566A | 2012-12-06 |
Attorney, Agent or Firm:
YAMAMOTO Toshitake (JP)
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