Title:
COMBINED SENSOR
Document Type and Number:
WIPO Patent Application WO/2008/023573
Kind Code:
A1
Abstract:
In a combined detection element (6), an acceleration detection element (2) and an
angular velocity detection element (4) are laminated on each other, and the angular
velocity detection element (4) is so disposed above the acceleration detection
element (2) as to be separated from the weight parts (12) of the acceleration detection
element (2). The angular velocity detection element (4) includes a recess (26)
for separating the detection element from the weight parts (12) of the acceleration
detection element (2) in the surface of the detection element facing the weight
parts (12) of the acceleration detection element (2). At least a part of the recess
(26) is so formed that its depth does not exceed the movable range of the weight
parts (12) to suppress the upward movement of the weight parts (12) of the acceleration
detection element (2).
Inventors:
AIZAWA HIROYUKI
OHUCHI SATOSHI
OHUCHI SATOSHI
Application Number:
PCT/JP2007/065583
Publication Date:
February 28, 2008
Filing Date:
August 09, 2007
Export Citation:
Assignee:
MATSUSHITA ELECTRIC IND CO LTD (JP)
AIZAWA HIROYUKI
OHUCHI SATOSHI
AIZAWA HIROYUKI
OHUCHI SATOSHI
International Classes:
G01P15/12; G01C19/56; G01C19/5607; G01C19/5628; G01D21/02; G01P15/09; G01P15/14; H01L29/84
Foreign References:
| JP2002005951A | 2002-01-09 | |||
| JP2003014778A | 2003-01-15 | |||
| JP2006125887A | 2006-05-18 | |||
| JP2007108044A | 2007-04-26 | |||
| JP2001208546A | 2001-08-03 | |||
| JP2001074767A | 2001-03-23 |
Other References:
See also references of EP 2037285A4
Attorney, Agent or Firm:
IWAHASHI, Fumio et al. (1006, Oaza Kadom, Kadoma-shi Osaka, JP)
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