Title:
COMPONENT FOR VACUUM PUMP, SIEGBAHN TYPE EXHAUST MECHANISM, AND COMPOUND VACUUM PUMP
Document Type and Number:
WIPO Patent Application WO/2015/079801
Kind Code:
A1
Abstract:
[Problem] To provide a component for a vacuum pump that effectively connects conduits having an exhaust function together, a Siegbahn type exhaust mechanism, and a compound vacuum pump wherein conduits having an exhaust function are effectively connected together. [Solution] A vacuum pump of an embodiment of the present invention is a compound vacuum pump that is equipped with a vacuum pump component that effectively connects conduits having an exhaust function together and a Siegbahn type exhaust mechanism. Spiral grooves (spiral grooves) having peak and valley regions are formed on a stationary disk, and protrusions (projections) are formed on the inner diameter part of the stationary disk, that is, on the side facing a rotary cylinder (rotor cylindrical part), and/or on the inner diameter side of a stationary cylinder that is disposed on the outer peripheral side of the stationary disk. In addition, spiral grooves having peak and valley regions are formed on a rotary disk, and protrusions (projections) are formed on the outer diameter part of a rotary cylinder that is disposed on the inner peripheral side of the rotary disk and/or on the outer diameter part of the rotary disk, that is, on the side where the rotary disk faces a spacer.
Inventors:
NONAKA MANABU (JP)
KABASAWA TAKASHI (JP)
KABASAWA TAKASHI (JP)
Application Number:
PCT/JP2014/076499
Publication Date:
June 04, 2015
Filing Date:
October 03, 2014
Export Citation:
Assignee:
EDWARDS JAPAN LTD (JP)
International Classes:
F04D19/04
Foreign References:
| JP2005194994A | 2005-07-21 | |||
| JPS61226596A | 1986-10-08 | |||
| JPS63255598A | 1988-10-21 | |||
| JPS60204997A | 1985-10-16 | |||
| JPH02501275A | 1990-05-10 |
Other References:
See also references of EP 3076021A4
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