COMPOSITE BODY COMPRISING DIAMOND CRYSTAL BODY

WIPO Patent Application WO/2020/230520

A1

Provided is a substrate and diamond crystal body-bonding method for bonding a diamond crystal body and a substrate together in the atmosphere at room temperature without the necessity of a special bonding load. This substrate and diamond crystal body-bonding method has a hydroxylation step for processing the (111) surface of a diamond crystal body using an acidic liquid to introduce OH to at least a portion of the C atoms in the (111) surface of the diamond crystal body, and a bonding step for bringing the (111) surface into which OH has been introduced in the hydroxylation step into contact with a surface of the substrate having a hydroxylated product of at least one of metal elements that can form an oxide (note that the alkali metals and the alkaline-earth metals are excluded), Si, Ge, As, Se, Sb, Te, and Bi at the surface thereof, and giving dehydration energy to the contact portion to cause a dehydration reaction.

WO/1993/013015	COMPOSITE DIAMOND GRAINS AND PROCESS FOR THEIR PRODUCTION
JP2813363	INDUSTRIAL APPLICABILITY: Diamond semiconductor and its manufacturing method.
JPH075432	[Title of Invention] Method for Synthetic Gas Phase of Diamond

MATSUMAE TAKASHI (JP)
UMEZAWA HITOSHI (JP)
KURASHIMA YUUICHI (JP)
TAKAGI HIDEKI (JP)

PCT/JP2020/016893

November 19, 2020

April 17, 2020

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AIST (JP)

C30B29/04; C30B33/06; H01L21/02; H01L29/16

JP2019062020A	2019-04-18
JPH11307747A	1999-11-05
JP2009209028A	2009-09-17
JP2010222172A	2010-10-07
JP2018074172A	2018-05-10

G. N. YUSHIN ET AL., APPL. PHYS. LETT., vol. 81, 2002, pages 3275 - 3277
J. HAISMAB. A. C. M. SPIERINGSU. K. P. BIERMANNA. A. VAN GORKUM, APPL. OPT., vol. 33, 1994, pages 1154
See also references of EP 3967792A4

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