Title:
COMPOSITE CHARGED PARTICLE BEAM DEVICE
Document Type and Number:
WIPO Patent Application WO/2016/125844
Kind Code:
A1
Abstract:
This composite charged particle beam device comprises a first charged particle beam column (6), a second charged particle beam column (1) which is equipped with a deceleration system, and is equipped with a detector (3) inside the column, a test piece stage (10) on which a test piece (9) is placed, and an electric field correction electrode (13) which is provided around the tip of the first charged particle beam column, wherein the electric field correction electrode is an electrode that corrects the electric field distribution formed in the vicinity of the test piece, and the electric field correction electrode is positioned between the test piece and the first charged particle beam column, and on the opposite side from the second charged particle beam column with respect to the optical axis of the first charged particle beam column.
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Inventors:
IMAI YUTA (JP)
MORISHITA HIDEO (JP)
AGEMURA TOSHIHIDE (JP)
MORISHITA HIDEO (JP)
AGEMURA TOSHIHIDE (JP)
Application Number:
PCT/JP2016/053305
Publication Date:
August 11, 2016
Filing Date:
February 04, 2016
Export Citation:
Assignee:
HITACHI HIGH TECH CORP (JP)
International Classes:
H01J37/317; H01J37/12; H01J37/147; H01J37/20; H01J37/28
Domestic Patent References:
| WO2014030433A1 | 2014-02-27 |
Foreign References:
| JP2013191571A | 2013-09-26 | |||
| JP2010257855A | 2010-11-11 | |||
| JP2004134379A | 2004-04-30 | |||
| JP2014239037A | 2014-12-18 |
Attorney, Agent or Firm:
HIRAKI Yusuke et al. (JP)
Yusuke Hiraki (JP)
Yusuke Hiraki (JP)
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