Title:
COMPOSITE COATING AND METHOD FOR FORMING COMPOSITE COATING
Document Type and Number:
WIPO Patent Application WO/2019/172321
Kind Code:
A1
Abstract:
Provided is a coating that has exceptional breaking resistance and separation resistance, and that can produce exceptional adhesion and has sufficient durability even when used in applications where substantial contact stress repeatedly occurs during sliding. Also provided is a method for forming the coating. This composite coating is formed on a substrate, wherein: a 200 to 1000 nm thick hard carbon film A having a hydrogen content of less than 5 at% is formed as the bottom layer; a 210 to 5000 nm thick hard carbon film B that has a hydrogen content of 5 to 30 at% and a Young's modulus of greater than 200 GPa is formed as the top layer; and the hard carbon film A and hard carbon film B are directly laminated to each other.
Inventors:
FUJII SHINYA (JP)
MORIGUCHI HIDEKI (JP)
MORIGUCHI HIDEKI (JP)
Application Number:
PCT/JP2019/008891
Publication Date:
September 12, 2019
Filing Date:
March 06, 2019
Export Citation:
Assignee:
NIPPON ITF INC (JP)
International Classes:
C23C14/06; C23C14/32; C23C16/27
Domestic Patent References:
| WO2016042629A1 | 2016-03-24 | |||
| WO2018155385A1 | 2018-08-30 |
Foreign References:
| JP2009504919A | 2009-02-05 | |||
| JP2017171988A | 2017-09-28 | |||
| JP2009504448A | 2009-02-05 |
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