Title:
COMPOSITE GETTER FOR MAINTAINING MEDIUM AND LOW VACUUM ENVIRONMENT, AND METHOD FOR PRODUCING SAME
Document Type and Number:
WIPO Patent Application WO/2011/147322
Kind Code:
A1
Abstract:
A composite getter for maintaining medium and low vacuum environment comprises an elemental metal powder getter (3), an alloy powder getter (2), a drying agent powder (1) and a plastic film (4), wherein the elemental metal powder getter (3) and the alloy powder getter (2) are present respectively as one layer and stacked in the center position of the drying agent powder (1) to form a core-clad structure, which is packed in the plastic film (4). The elemental metal powder getter (3) is one or a combination of at least two selected from the group consisting of reduced iron powder, nickel powder and copper powder with a grain size range from 10 to 200 μm. The alloy powder getter (2) is one or a combination of at least two selected from the group consisting of strontium-lithium alloy powder, barium-lithium alloy powder and barium-magnesium alloy powder with a grain size range from 50 to 500 μm. The drying agent powder (1) is one or a combination of at least two selected from the group consisting of calcium oxide powder, strontium oxide powder and barium oxide powder with a grain size range from 20 to 200 μm. The plastic film (4) is breakable automatically under a pressure difference of one atmosphere. The performance properties of this composite getter is not affected when exposed to air for a short period of time. The method for producing the composite getter is also disclosed.
Inventors:
DI, Xiaobo (Fujian Super Tech Advanced Material Co. Ltd, Liancheng Industrial Are, Longyan Fujian 0, 366200, CN)
邸小波 (中国福建省龙岩市连城工业园区福建赛特新材股份有限公司, Fujian 0, 366200, CN)
XIE, Zhengang (Fujian Super Tech Advanced Material Co. Ltd, Liancheng Industrial Are, Longyan Fujian 0, 366200, CN)
邸小波 (中国福建省龙岩市连城工业园区福建赛特新材股份有限公司, Fujian 0, 366200, CN)
XIE, Zhengang (Fujian Super Tech Advanced Material Co. Ltd, Liancheng Industrial Are, Longyan Fujian 0, 366200, CN)
Application Number:
CN2011/074729
Publication Date:
December 01, 2011
Filing Date:
May 26, 2011
Export Citation:
Assignee:
FUJIAN SUPER TECH ADVANCED MATERIAL.CO., LTD. (Liancheng Industrial Area, Longyan, Fujian 0, 366200, CN)
福建赛特新材股份有限公司 (中国福建省龙岩市连城工业园区, Fujian 0, 366200, CN)
DI, Xiaobo (Fujian Super Tech Advanced Material Co. Ltd, Liancheng Industrial Are, Longyan Fujian 0, 366200, CN)
邸小波 (中国福建省龙岩市连城工业园区福建赛特新材股份有限公司, Fujian 0, 366200, CN)
福建赛特新材股份有限公司 (中国福建省龙岩市连城工业园区, Fujian 0, 366200, CN)
DI, Xiaobo (Fujian Super Tech Advanced Material Co. Ltd, Liancheng Industrial Are, Longyan Fujian 0, 366200, CN)
邸小波 (中国福建省龙岩市连城工业园区福建赛特新材股份有限公司, Fujian 0, 366200, CN)
International Classes:
B01J20/02; H01J9/39; H01L23/26
Attorney, Agent or Firm:
SHOUCHUANG JUNHE PATENT AGENT CO., LTD. XIAMEN (5F Labour Force Market Building, No.191 Changqing Road Siming Distric, Xiamen Fujian 2, 361012, CN)
Claims: