COMPOSITE MATERIAL COMPOSITION FOR A WAFER CARRIER

WIPO Patent Application WO/2012/081780

A1

The present invention relates to a composite material composition for a wafer carrier, and more specifically relates to a composite material composition for a wafer carrier, wherein the composition for a wafer carrier: comprises carbon nanotubes in a base polymer; has outstanding impact strength and tensile strength, has an improved ability to prevent static electricity due to high electrical conductivity; and is outstandingly acid resistant and deformation resistant.

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KIM YEONG KYUN (KR)
CHO HYUN JIN (KR)
JUNG IN SOON (KR)
LIM JONG DAE (KR)
YOON JONG KUK (KR)
MOON DONG JIN (KR)
CHOI HYUN CHUL (KR)
CHOI YUN HO (KR)

PCT/KR2011/004523

June 21, 2012

June 21, 2011

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EM POWER CO LTD (KR)
KIM YEONG KYUN (KR)
CHO HYUN JIN (KR)
JUNG IN SOON (KR)
LIM JONG DAE (KR)
YOON JONG KUK (KR)
MOON DONG JIN (KR)
CHOI HYUN CHUL (KR)
CHOI YUN HO (KR)

C08K3/04; C08K7/04; C08L101/12; H01B1/24

KR100943125B1	2010-02-18
JP2008239947A	2008-10-09
KR20100058099A	2010-06-03
JP2005325341A	2005-11-24

KIM, In Han et al. (KR)
김인한 (KR)

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