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Patent Searching and Data


Title:
COMPOSITE OXIDE SINTERED BODY, SPUTTERING TARGET, AND METHOD FOR MANUFACTURING OXIDE TRANSPARENT CONDUCTIVE FILM
Document Type and Number:
WIPO Patent Application WO/2019/027153
Kind Code:
A1
Abstract:
The present invention provides: a composite oxide sintered body in which a composite oxide sintered body composition comprising indium, titanium, zirconium and oxygen comprises, as a dopant (X), one element among gallium, tantalum and niobium, wherein the titanium is included in an atomic ratio of Ti/(In+Ti+Zr+X) of 0.1-0.5 atom% and the zirconium is included in an atomic ratio of Zr/(In+Ti+Zr+X) of 0.1-1.5 atom%; a sputtering target formed from a sintered body; and an oxide transparent conductive film manufactured therefrom.

Inventors:
KIM, Sang-Hui (709-102, 12 Gwanpyeong 1-ro,,Yuseong-gu, Daejeon, 34021, KR)
Application Number:
KR2018/007802
Publication Date:
February 07, 2019
Filing Date:
July 10, 2018
Export Citation:
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Assignee:
ADVANCED NANO PRODUCTS CO., LTD. (78 Geumhoangol-gil, Bugang-myeon, Sejong, 30077, KR)
International Classes:
C04B35/462; C23C14/08; C23C14/34; H01B1/08; H01B5/14
Attorney, Agent or Firm:
OAM PATENT & TRADEMARK LAW FIRM (201 69, Munye-ro,Seo-gu, Daejeon, 35240, KR)
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