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Patent Searching and Data


Title:
COMPOSITE SENSOR
Document Type and Number:
WIPO Patent Application WO/2012/111357
Kind Code:
A1
Abstract:
The purpose of the present invention is to provide a composite sensor, wherein influence of an electrostatic force generated due to a potential difference is suppressed, and deterioration of an S/N ratio and fluctuation of sensor sensitivity can be eliminated. This composite sensor is provided with, by having formed in a laminated substrate, a first movable section and a second movable section, and a first dummy section and a second dummy section, said first dummy section and second dummy section being disposed at the peripheries of the first movable section and the second movable section. The first dummy section and the second dummy section are electrically isolated from each other, a first potential is applied to the first movable section and the first dummy section, and a second potential is applied to the second movable section and the second dummy section (see fig.2).

Inventors:
JEONG Heewon (HITACHI LTD., 280, Higashikoigakubo 1-chome, Kokubunji-sh, Tokyo 01, 〒1858601, JP)
鄭 希元 (〒01 東京都国分寺市東恋ヶ窪一丁目280番地 株式会社日立製作所 中央研究所内 Tokyo, 〒1858601, JP)
Application Number:
JP2012/050214
Publication Date:
August 23, 2012
Filing Date:
January 10, 2012
Export Citation:
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Assignee:
HITACHI AUTOMOTIVE SYSTEMS, LTD. (2520, Takaba Hitachinaka-sh, Ibaraki 03, 〒3128503, JP)
日立オートモティブシステムズ株式会社 (〒03 茨城県ひたちなか市高場2520番地 Ibaraki, 〒3128503, JP)
JEONG Heewon (HITACHI LTD., 280, Higashikoigakubo 1-chome, Kokubunji-sh, Tokyo 01, 〒1858601, JP)
International Classes:
G01C19/5726; B81B3/00; G01C19/5769; G01P15/08; G01P15/125; H01L29/84
Domestic Patent References:
WO2010119573A1
WO2004065968A1
Foreign References:
JP2002005950A
JP2009168777A
JP2009145321A
JP2010145212A
JP2001091263A
JP2005114564A
Attorney, Agent or Firm:
HIRAKI Yusuke et al. (Atago Green Hills MORI Tower 32F, 5-1 Atago 2-chome, Minato-k, Tokyo 32, 〒1056232, JP)
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Claims: