Title:
COMPOSITE SENSOR
Document Type and Number:
WIPO Patent Application WO/2012/111357
Kind Code:
A1
Abstract:
The purpose of the present invention is to provide a composite sensor, wherein influence of an electrostatic force generated due to a potential difference is suppressed, and deterioration of an S/N ratio and fluctuation of sensor sensitivity can be eliminated.
This composite sensor is provided with, by having formed in a laminated substrate, a first movable section and a second movable section, and a first dummy section and a second dummy section, said first dummy section and second dummy section being disposed at the peripheries of the first movable section and the second movable section. The first dummy section and the second dummy section are electrically isolated from each other, a first potential is applied to the first movable section and the first dummy section, and a second potential is applied to the second movable section and the second dummy section (see fig.2).
Inventors:
JEONG HEEWON (JP)
HAYASHI MASAHIDE (JP)
HAYASHI MASAHIDE (JP)
Application Number:
PCT/JP2012/050214
Publication Date:
August 23, 2012
Filing Date:
January 10, 2012
Export Citation:
Assignee:
HITACHI AUTOMOTIVE SYSTEMS LTD (JP)
JEONG HEEWON (JP)
HAYASHI MASAHIDE (JP)
JEONG HEEWON (JP)
HAYASHI MASAHIDE (JP)
International Classes:
G01C19/5726; B81B3/00; G01C19/5769; G01P15/08; G01P15/125; H01L29/84
Domestic Patent References:
| WO2010119573A1 | 2010-10-21 | |||
| WO2004065968A1 | 2004-08-05 |
Foreign References:
| JP2002005950A | 2002-01-09 | |||
| JP2009168777A | 2009-07-30 | |||
| JP2009145321A | 2009-07-02 | |||
| JP2010145212A | 2010-07-01 | |||
| JP2001091263A | 2001-04-06 | |||
| JP2005114564A | 2005-04-28 |
Attorney, Agent or Firm:
HIRAKI Yusuke et al. (JP)
Yusuke Hiraki (JP)
Yusuke Hiraki (JP)
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