Title:
COMPOSITE SHEET FOR FORMING PROTECTIVE FILM
Document Type and Number:
WIPO Patent Application WO/2016/002975
Kind Code:
A8
Abstract:
Provided is a composite sheet for forming a protective film, comprising an adhesive sheet obtained by laminating an adhesive layer on one surface side of a substrate, and a film for protective film formation which is laminated on the adhesive layer side of the adhesive sheet, wherein the degrees of expansion/shrinkage of the substrate in the MD direction and the CD direction after heating compared to before heating, with a load of 0.1g/mm being applied to the substrate, the substrate being heated at 130°C for two hours and then cooled to 23°C, are 95-103%, and the tensile moduli of elasticity of the substrate in the MD direction and CD direction at 23°C are both 100-700MPa.
Inventors:
SAIKI NAOYA (JP)
YONEYAMA HIROYUKI (JP)
YAMAMOTO DAISUKE (JP)
KOBASHI RIKIYA (JP)
INAO YOUICHI (JP)
YONEYAMA HIROYUKI (JP)
YAMAMOTO DAISUKE (JP)
KOBASHI RIKIYA (JP)
INAO YOUICHI (JP)
Application Number:
PCT/JP2015/075100
Publication Date:
March 31, 2016
Filing Date:
September 03, 2015
Export Citation:
Assignee:
LINTEC CORP (JP)
International Classes:
H01L21/301; C09J7/20; C09J201/00
Attorney, Agent or Firm:
SHIGA Masatake et al. (Marunouchi Chiyoda-k, Tokyo 20, JP)
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