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Patent Searching and Data


Title:
COMPOSITE SHEET FOR PROTECTIVE FILM FORMATION AND METHOD FOR PRODUCING SAME
Document Type and Number:
WIPO Patent Application WO/2019/186994
Kind Code:
A1
Abstract:
The present invention relates to a composite sheet for protective film formation, which is provided with: a support sheet that comprises a base material and an adhesive layer on the base material; and a film for protective film formation, which is arranged on the adhesive layer of the support sheet. This composite sheet for protective film formation is configured such that: the adhesive layer-side surface of the base material is a recessed and projected surface; and if test pieces are cut out of the composite sheet for protective film formation at five different positions and the maximum height difference between the highest point of the projections and the deepest point of the recesses in the base material-side surface of the adhesive layer and the maximum height difference between the highest point of the projections and the deepest point of the recesses in the adhesive layer-side surface of the film for protective film formation are determined with respect to these five test pieces, the average of the maximum height differences in the base material-side surfaces of the adhesive layers is 1-7 μm and the average of the maximum height differences in the adhesive layer-side surfaces of the films for protective film formation is 2 μm or less.

Inventors:
SAIKI Naoya (23-23 Honcho, Itabashi-k, Tokyo 01, 〒1730001, JP)
FURUNO Kenta (23-23 Honcho, Itabashi-k, Tokyo 01, 〒1730001, JP)
Application Number:
JP2018/013574
Publication Date:
October 03, 2019
Filing Date:
March 30, 2018
Export Citation:
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Assignee:
LINTEC CORPORATION (23-23, Honcho Itabashi-k, Tokyo 01, 〒1730001, JP)
International Classes:
H01L21/301; H01L21/56; H01L23/00
Foreign References:
JP5432853B22014-03-05
JP2010278297A2010-12-09
JP2012015342A2012-01-19
Attorney, Agent or Firm:
NISHIZAWA Kazuyoshi et al. (1-9-2, Marunouchi Chiyoda-k, Tokyo 20, 〒1006620, JP)
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