Title:
COMPOSITE SHEET FOR PROTECTIVE FILM FORMATION AND METHOD FOR PRODUCING SAME
Document Type and Number:
WIPO Patent Application WO/2019/187010
Kind Code:
A1
Abstract:
The present invention relates to a composite sheet for protective film formation, which is provided with: a support sheet that comprises a base material and an adhesive layer on the base material; and a film for protective film formation, which is arranged on the adhesive layer of the support sheet. This composite sheet for protective film formation is configured such that: the adhesive layer-side surface of the base material is a recessed and projected surface; and if test pieces are cut out of the composite sheet for protective film formation at five different positions and the interlayer distance between the film for protective film formation and the support sheet in a non-bonded region is measured with respect to these five test pieces, the interlayer distances are 0.5 μm or less.
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Inventors:
SAIKI NAOYA (JP)
FURUNO KENTA (JP)
FURUNO KENTA (JP)
Application Number:
PCT/JP2018/013624
Publication Date:
October 03, 2019
Filing Date:
March 30, 2018
Export Citation:
Assignee:
LINTEC CORP (JP)
International Classes:
H01L23/00; H01L21/301
Domestic Patent References:
| WO2017163971A1 | 2017-09-28 |
Foreign References:
| JP6298226B1 | 2018-03-20 | |||
| JP2011190339A | 2011-09-29 | |||
| JP2012015342A | 2012-01-19 |
Attorney, Agent or Firm:
NISHIZAWA Kazuyoshi et al. (JP)
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